To achieve the best ultra-high resolution SEM, we use a Leica high vacuum coater for depositing metals (palladium, gold, iridium, alloys) or carbon coating to maximize electron conductivity. We are able to consistently achieve reproducible, ultra-thin (nanometer scale) film. The high vacuum turbo-pump allows a much finer grained film compared to standard coating systems. The large vacuum chamber allows for multiple samples to be coated at the same time.

coater

Leica EM ACE600 Coater

coater-chamber

Rotating Stage with deposition thickness sensor