Interferometric Microscope

The ZeGage profiler is a sub-nanometer precise surface roughness measurement tool. It is used to measure a wide variety of surfaces and materials with superior gage capability. Non-contact metrology technique prevents damage to specimen being measured.


  • Rough
  • Smooth
  • Ground
  • Honed
  • Lapped
  • Polished


  • Geological
  • Glass
  • Ceramic
  • Metal

Profiler measurements are output as graphical reports with excellent surface detail. Measurements correlate to 2D and 3D standards and also complies with ISO 25178 surface roughness parameters.


ZeGage Zygo Interferometric Microscope